5 Simple Techniques For Noohapou
5 Simple Techniques For Noohapou
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Remote spots: Static units are usually located remotely, growing Price tag and reducing overall process effectiveness.
Software & TCU software calibration procedures differ external check equipment not used often for verifying
While using the POU3500, you may achieve unprecedented results in etch effectiveness, chamber uptime, lessened cost of ownership and fab space utilization – all when enhancing your process reliability.
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This amazing procedure, supplying a small variety variable, low Cost-of-possession and Dynamic Temperature Command presented procedure and products engineers a new Resource to enhance their temperature delicate check here procedures.
The accuracy of your POU 3300 permits independent Charge of the process fluid temperature for the wafer chuck inside of +/- 0.1 °C of established stage, and also the rapidly reaction time of your technique permits for max wafer-to-wafer repeatability through the etch procedure.
The precision in the POU 3500 permits independent control of the method fluid temperature to your wafer chuck inside +/- 0.1 °C of established point, as well as the quickly reaction time of the technique permits for max wafer-to-wafer repeatability through the etch process.
With our unit strategically mounted about 6 feet through the chamber, we obtain a way more precise reading through in the chuck temperature. This method makes certain dependable temperature throughout the output large amount, leading to enhanced wafer-to-wafer CD uniformity.
big Footprint: Static models occupy significant Place in the fabrication Device area, minimizing its efficiency.
LAUDA-Noah is Conference these new challenges and it has incorporated Electricity conserving know-how in programs which might be friendly to your setting and also have a inexpensive to function.
The TEs' can switch directly from heating to cooling, or visa-versa. they will turn on & off even though while in the heating or cooling mode and might boost or reduce the quantity of heating or cooling with no switching by any means.
More than at any time, shrinking machine geometries, demanding new processes and also a hugely competitive environment involve temperature Manage methods that Blend quick and exact temperature control having an emphasis on lowered working prices and improved reliability.
the truth is that genuine Dynamic Temperature Regulate can only be attained when all five (five) of the subsequent system style and set up requirements are fulfilled:
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We call for significantly less cooling/heating ability for the same application for a static TCU as a consequence of our smaller reservoir quantity.
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